pp. 2925-2933
S&M4094 Research Paper of Special Issue https://doi.org/10.18494/SAM5634 Published: July 11, 2025 Piezoelectric Nanogenerator Based on Vertically Aligned ZnO Nanowire Arrays for Piezoelectric Energy Harvesting and Sensor [PDF] Ming-Cheng Kao and Kai-Huang Chen (Received March 17, 2025; Accepted May 23, 2025) Keywords: ZnO, nanowire, piezoelectric, energy harvesting, sensor
In this study, we investigated the effects of seed layer thickness on the structural and piezoelectric properties of ZnO nanowires (ZNWs) and evaluated their energy harvesting performance. ZNWs with seed layer thicknesses of 100, 200, 300, and 400 nm were synthesized and characterized. The results show that a ZNW with a 300 nm seed layer (ZNW-300) has the highest aspect ratio, resulting in excellent piezoelectric performance with a piezoelectric charge coefficient (d33) of 10.5 pm/V and a peak-to-peak voltage output of 4.6 V. The energy harvesting performance was further verified through a 150 μF capacitor charging test, which successfully charged to 3.5 V in 12 s, generating a power output of 76.56 μW. These findings highlight the potential of ZNW-based piezoelectric nanogenerators for self-powered applications, including wearable electronics, wireless sensor networks, and sustainable energy harvesting systems.
Corresponding author: Ming-Cheng Kao and Kai-Huang Chen![]() ![]() This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Ming-Cheng Kao and Kai-Huang Chen, Piezoelectric Nanogenerator Based on Vertically Aligned ZnO Nanowire Arrays for Piezoelectric Energy Harvesting and Sensor, Sens. Mater., Vol. 37, No. 7, 2025, p. 2925-2933. |