pp. 425-433
S&M740 Research Paper of Special Issue https://doi.org/10.18494/SAM.2009.572 Published: March 19, 2009 Effect of Depositing Tin Oxide Thin Film in Liquid Phase and Dip-Coating Cu and Au Catalysts on H2S Gas-Sensing Performance [PDF] Jin-Chern Chiou, Sheng-Wei Tsai, Ya-Shu Liu and Chen-Tang Huang (Received July 30, 2008; Accepted November 23, 2008) Keywords: LPD, tin oxide, porous, catalyst, gas sensor
In this study, unlike conventional methods used to grow gas sensor films, a liquid-phase deposition method was used to deposit fluorine-doped tin oxide as the sensing material of a gas sensor. Furthermore, silica was doped into the film as an inhibitor to prevent the grain growth of tin oxide during the calcination process. This structure can be used to improve the sensitivity of a H2S sensor. By adding a moderate quantity of copper and gold catalysts on the surface of film, the sensitivity can be dramatically improved.
Corresponding author: Sheng-Wei TsaiCite this article Jin-Chern Chiou, Sheng-Wei Tsai, Ya-Shu Liu and Chen-Tang Huang, Effect of Depositing Tin Oxide Thin Film in Liquid Phase and Dip-Coating Cu and Au Catalysts on H2S Gas-Sensing Performance, Sens. Mater., Vol. 20, No. 8, 2009, p. 425-433. |