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Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 22, Number 3 (2010)
Copyright(C) MYU K.K.
pp. 121-134
S&M794 Research Paper
https://doi.org/10.18494/SAM.2010.617
Published: April 28, 2010

Detection of Hydrogen and NOx Gases Based on a Thermoelectric Gas Sensor with an Embedded Tin Oxide Catalyst [PDF]

Seung-Il Yoon, Chung-Il Lee and Yong-Jun Kim

(Received March 26, 2009; Accepted September 8, 2009)

Keywords: thermoelectric gas sensor, tin oxide, thermal resistivity layer, hydrogen gas detection, NOx gas detection

In this paper, we report a micromachined thermoelectric gas sensor with an embedded catalyst that can be used for gas sensing applications. The proposed sensor can detect the target gas by measuring heat from the catalytic reaction on the surface of the catalyst, tin oxide in this case. By using the thermoelectric effect, decreased response and recovery times can be obtained. To increase the sensitivity of the sensor, the thermal components of the proposed gas sensor are fabricated on a high-thermal-resistivity layer, SU-8 in this case, which led to the reduction in the rate of parasitic heat transfer to the substrate. In order to verify the thermal characteristic of the fabricated sensor, the intensity of output signals depending on the temperature differences between the hot and cold junctions was measured. The sensor response to the temperature change was 4.61 V/W. Hydrogen and NOx gases were detected by the proposed sensor. The change in output signal intensity depending on hydrogen gas concentration was 1.06×10−1 µV/ppm, and the change in output signal intensity depending on NOx gas concentration was 1.50×10−1 µV/ppm.

Corresponding author: Yong-Jun Kim


Cite this article
Seung-Il Yoon, Chung-Il Lee and Yong-Jun Kim, Detection of Hydrogen and NOx Gases Based on a Thermoelectric Gas Sensor with an Embedded Tin Oxide Catalyst, Sens. Mater., Vol. 22, No. 3, 2010, p. 121-134.



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