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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 22, Number 1 (2010)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1-11
S&M784 Research Paper of Special Issue https://doi.org/10.18494/SAM.2010.619 Published: January 14, 2010 Tensile Testing of Single-Crystal Silicon Thin Films at 600 oC Using Infrared Radiation Heating [PDF] Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano and Osamu Tabata (Received May 11, 2009; Accepted August 11, 2009) Keywords: single-crystal silicon, thin films, mechanical properties, tensile test, plastic deformation
In this paper, we report the development of a new tensile tester operable at 800°C using an infrared radiation heating method to evaluate the mechanical properties of thin films at high temperature. The tester uses an electrostatic grip system for specimen chucking. We evaluated the grip force at high temperature and concluded that the electrostatic grip is effective up to 800°C. Single-crystal silicon specimens of 3 μm thickness and 4 μm width were tested at room temperature (RT) and 600°C. At RT, the fracture strength and Young’s modulus were 3.33 and 163.2 GPa, respectively. At 600°C, they were 2.71 and 151.8 GPa, respectively. The stress and stage displacement curves at 600°C with lower strain rate showed yield points and the fractured specimens exhibited slip lines.
Corresponding author: Toshiyuki Tsuchiya Cite this article Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano and Osamu Tabata, Tensile Testing of Single-Crystal Silicon Thin Films at 600 oC Using Infrared Radiation Heating, Sens. Mater., Vol. 22, No. 1, 2010, p. 1-11. |
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