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pp. 6147-6162
S&M4672 Report https://doi.org/10.18494/SAM6568 Published: October 29, 2026 High-precision Air-bearing Linear Motor Positioning Platform: Modeling, Sensing Integration, and Control Performance Evaluation [PDF] Ming-Chan Lee, Wen-Jie Hsu, Yu-Lin Guan, Guan-Yi Chen, Chun-Mei Chen, Chia-Ming Jan, Kuo-Yu Chien, Hung-Pin Chan, Wen-Tse Hsaio, Yow-Ling Shiue, Jieh-Joe Chen, and Chia-Wei Lin (Received August 7, 2026; Accepted September 30, 2026) Keywords: precision positioning platform, permanent magnet linear synchronous motor (PMLSM), modeling, feedback control, sensing
In this study, we present the design, dynamic modeling, sensing integration, and control performance evaluation of a high-precision positioning platform driven by a permanent magnet linear synchronous motor and supported by an air-bearing guideway. The platform is developed to fulfill the dual requirements of long travel range and nanometer-level positioning resolution, with broad applicability in precision manufacturing and metrology. An optical incremental linear encoder is integrated as the primary displacement sensing element, providing high-resolution position feedback essential for closed-loop control. The system dynamics are rigorously modeled and verified in MATLAB/Simulink, and a proportional–integral–derivative controller is designed and tuned to evaluate baseline control performance. Simulation results demonstrate a stable step response with satisfactory rise time, settling time, and steady-state positioning accuracy. The proposed sensing–actuation architecture is designed with structural expandability toward multi-axis motion control. These findings establish a systematic design and evaluation framework that serves as a foundation for the subsequent implementation of advanced control strategies, including active disturbance rejection control, to further enhance dynamic stiffness and robustness under high-speed, high-precision operating conditions.
Corresponding author: Ming-Chan Lee and Chia-Wei Lin![]() ![]() This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Ming-Chan Lee, Wen-Jie Hsu, Yu-Lin Guan, Guan-Yi Chen, Chun-Mei Chen, Chia-Ming Jan, Kuo-Yu Chien, Hung-Pin Chan, Wen-Tse Hsaio, Yow-Ling Shiue, Jieh-Joe Chen, and Chia-Wei Lin, High-precision Air-bearing Linear Motor Positioning Platform: Modeling, Sensing Integration, and Control Performance Evaluation, Sens. Mater., Vol. 38, No. 10, 2026, p. 6147-6162. |