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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
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Sensors and Materials, Volume 22, Number 7 (2010)
Copyright(C) MYU K.K.
pp. 347-356
S&M814 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2010.675
Published: October 14, 2010

Gas Adsorption Performance of Organic Thin Films Prepared by Plasma-Assisted Vacuum Evaporation with Polyimide Precursors [PDF]

Satoru Iwamori, Ryousuke Sugimoto, Kousuke Osada, Masahiko Kurata, Hiroyuki Matsumoto and Kazutoshi Noda

(Received January 26, 2010; Accepted May 13, 2010)

Keywords: plasma, vacuum evaporation, quartz crystal microbalance, polyimide

Organic thin films were deposited onto a quartz crystal with pyromellitic dianhydride (PMDA) and oxydianiline (ODA) by vacuum evaporation with or without argon plasma, and adsorption properties on these thin films for volatile organic compounds (VOCs), i.e., acetone, acetaldehyde, toluene, methyl salicylate, and some types of alcohol, were evaluated using a quartz crystal microbalance (QCM), to investigate their potential as gas sensors. The number of adsorbed gas molecules increased with decreasing molecular weight on each organic thin film. Furthermore, the numbers of adsorbed gas molecules on the organic thin films deposited by vacuum evaporation with argon plasma were higher than those on the organic thin films deposited by vacuum evaporation without the plasma. The numbers of adsorbed gas molecules on both the polyimide thin films with and without argon plasma decreased with increasing temperature in the adsorbed-gas-measuring system.

Corresponding author: Satoru Iwamori


Cite this article
Satoru Iwamori, Ryousuke Sugimoto, Kousuke Osada, Masahiko Kurata, Hiroyuki Matsumoto and Kazutoshi Noda, Gas Adsorption Performance of Organic Thin Films Prepared by Plasma-Assisted Vacuum Evaporation with Polyimide Precursors, Sens. Mater., Vol. 22, No. 7, 2010, p. 347-356.



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