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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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English 日本語
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 23, Number 7 (2011)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 435-448
S&M857 Research Paper of Special Issue https://doi.org/10.18494/SAM.2011.767 Published: October 20, 2011 Design of Optical System for Electrostatic Field Distribution Measurement Using Micromirror Array [PDF] Toshihide Kuriyama, Toshikazu Aoi, Hiroshi Maeda, Takaki Itoh, Yoshifumi Ueno, Toshiyuki Nakaie, Nobutika Matsui and Hiroyuki Okumura (Received May 2, 2011; Accepted June 20, 2011) Keywords: micromirror, electrostatic field distribution, optical system
An optical system for electrostatic field distribution measurement using a micromirror array fabricated by a micro-electromechanical systems (MEMS) process has been designed. Each micromirror is suspended by two thin torsion bars, which is made by a silicon-on-insulator (SOI) wafer fabrication process. The deflection of each mirror by an electrostatic field is measured optically using a two-dimensional optical scanner and a position-sensitive detector (PSD). Another optical system for increasing the sensitivity has also been proposed, which will widen the voltage measurement range. The electrostatic field distribution measurement system was applied to a human body model, and the removal effect of electricity was tested using removing tools.
Corresponding author: Toshihide Kuriyama Cite this article Toshihide Kuriyama, Toshikazu Aoi, Hiroshi Maeda, Takaki Itoh, Yoshifumi Ueno, Toshiyuki Nakaie, Nobutika Matsui and Hiroyuki Okumura, Design of Optical System for Electrostatic Field Distribution Measurement Using Micromirror Array, Sens. Mater., Vol. 23, No. 7, 2011, p. 435-448. |
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