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Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 25, Number 9 (2013)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 609-618
S&M954 Research Paper of Special Issue https://doi.org/10.18494/SAM.2013.924 Published: December 16, 2013 Application of Nanoimprint Technology to Diffraction Grating Scale for Microrotary Encoder [PDF] Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi and Renshi Sawada (Received June 13, 2013; Accepted September 2, 2013) Keywords: nanoimprint, optical MEMS, rotary encoder, diffracting grating
Using nanoimprint technology, we developed a rotary diffraction grating scale, which is used for microrotary encoding. The off-center error between the center of the throughhole for inserting a rotational axis and the center of the high-precision micropattern on the periphery of the scale is less than 3 µm because we are able to shape the through-hole and the grating pattern simultaneously. The rotary grating is of sufficient accuracy to use as the scale in a microrotary encoder. The use of nanoimprinting is groundbreaking, in view of the traditionally poor centering precision of grating scale through-holes fabricated by conventional photolithography coupled with the machining of throughholes.
Corresponding author: Toshihiro Takeshita Cite this article Toshihiro Takeshita, Takuma Iwasaki, Eiji Higurashi and Renshi Sawada, Application of Nanoimprint Technology to Diffraction Grating Scale for Microrotary Encoder, Sens. Mater., Vol. 25, No. 9, 2013, p. 609-618. |
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