pp. 371-377
S&M1004 Research Paper of Special Issue https://doi.org/10.18494/SAM.2014.988 Published: June 30, 2014 Theoretical Analyses and Experimental Evaluation of a Small-Displacement Sensor Based on Surface Plasmon Resonance Technology [PDF] Shinn-Fwu Wang, Chi-Tun Chen, Fu-Hsi Kao, Yi Chu, Yu-Pin Liao, Shyh-Rong Lay and An-Li Liu (Received December 24, 2013; Accepted March 6, 2014) Keywords: small-displacement measurement, surface plasmon resonance (SPR), heterodyne interferometry (HI), Kretchmann's configuration
In this paper, a small-displacement sensor based on the surface plasmon resonance technology and heterodyne interferometry is proposed. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a halfwave (λ/2) plate, two right-angle prisms with two metal films, and two rotation stages. The small-displacement sensor has high sensitivity and resolution owing to the attenuated total reflection effect in heterodyne interferometry. Additionally, we can obtain the results of the experiment in a distant place by using of a ZigBee module and a USB data acquisition card (DAQ card). It can be seen that the displacement resolution of the small-displacement sensor can reach 0.155 nm. The small-displacement sensor has some merits, such as easy operation, high measurement accuracy, high resolution, and rapid measurement, and its feasibility has been demonstrated.
Corresponding author: Shinn-Fwu WangCite this article Shinn-Fwu Wang, Chi-Tun Chen, Fu-Hsi Kao, Yi Chu, Yu-Pin Liao, Shyh-Rong Lay and An-Li Liu, Theoretical Analyses and Experimental Evaluation of a Small-Displacement Sensor Based on Surface Plasmon Resonance Technology, Sens. Mater., Vol. 26, No. 5, 2014, p. 371-377. |