Vol. 28 No. 2
Special Issue on Reliability in Micro/Nanosensors
Guest Editor: Toshiyuki Tsuchiya (Kyoto University) and Takahiro Namazu (University of Hyogo)
S&M1158Research Paper of Special Issue |
|
|
S&M1158 Electrical Resistance Characterization of Strain-Induced Multiwalled Carbon Nanotubes Using MEMS-Based Strain Engineering Device Kenji Yamauchi, Keisuke Obata, Shinya Nakata, Koji Sugano, Kisaragi Yashiro, and Yoshitada Isono pp. 75-88 https://doi.org/10.18494/SAM.2016.1240 Published on February 24, 2016 |
S&M1159Research Paper of Special Issue |
|
|
|
S&M1159 Design and Development of Electrostatically Driven Uniaxial Tensile Test Device for Silicon Nanowires Tatsuya Fujii, Koichi Sudoh, Shozo Inoue, and Takahiro Namazu pp. 89-102 https://doi.org/10.18494/SAM.2016.1282 Published on February 24, 2016 |
S&M1160Research Paper of Special Issue |
|
|
|
S&M1160 Irreversible Deformation of Micron-Thick Single-Crystal Silicon in the Temperature Range of 350–500 ℃ Kazuo Sato, Akira Sugimoto, and Tomo-omi Nishimura pp. 103-112 https://doi.org/10.18494/SAM.2016.1225 Published on February 24, 2016 |
S&M1161Research Paper of Special Issue |
|
|
|
S&M1161 Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato pp. 113-120 https://doi.org/10.18494/SAM.2016.1257 Published on February 24, 2016 |
S&M1162Research Paper of Special Issue |
|
|
|
S&M1162 Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, and Sherif Sedky pp. 121-129 https://doi.org/10.18494/SAM.2016.1245 Published on February 24, 2016 |
S&M1163Research Paper of Special Issue |
|
|
|
S&M1163 Parametrically Actuated Resonant Micromirror Using Stiffness Tunable Torsional Springs Yusuke Kawai, Jin-Hyeok Kim, Naoki Inomata, and Takahito Ono pp. 131-139 https://doi.org/10.18494/SAM.2016.1241 Published on February 24, 2016 |
S&M1164Research Paper of Special Issue |
|
|
|
S&M1164 Mechanical Reliability of Reactively Alloyed NiAl as a Structural Material Takahiro Namazu, Koichi Kuwahara, Masayuki Fujii, Shunsuke Kanetsuki, Shugo Miyake, and Shozo Inoue pp. 141-152 https://doi.org/10.18494/SAM.2016.1226 Published on February 24, 2016 |
S&M1165Research Paper of Special Issue |
|
|
|
S&M1165 Curvature-Corrected Hardness Measurement Technique for Nanoindentation of Bonding Wire Shugo Miyake, Emi Sasaki, Takaaki Kato, and Takahiro Namazu pp. 153-161 https://doi.org/10.18494/SAM.2016.1253 Published on February 24, 2016 |
S&M1166Research Paper of Special Issue |
|
|
|
S&M1166 Effect of Vacuum Annealing on Tensile Mechanical Characteristics of Au Bonding Wires Akio Takagi, Takaaki Kato, Shugo Miyake, Shozo Inoue, and Takahiro Namazu pp. 163-171 https://doi.org/10.18494/SAM.2016.1233 Published on February 24, 2016 |
Cover of this Issue |
 |