pp. 405-412
S&M342 Research Paper of Special Issue Published: 1998 Application of Harmonic Finite Element Analysis to a CMOS Heat-Capacity Measurement Structure [PDF] Markus Emmenegger, Jan G. Korvink, Martin Bächtold, Martin von Arx, Oliver Paul and Henry Baltes Cite this article Markus Emmenegger, Jan G. Korvink, Martin Bächtold, Martin von Arx, Oliver Paul and Henry Baltes, Application of Harmonic Finite Element Analysis to a CMOS Heat-Capacity Measurement Structure, Sens. Mater., Vol. 10, No. 7, 1998, p. 405-412. |