pp. 405-412
S&M342 Research Paper of Special Issue Published: 1998 Application of Harmonic Finite Element Analysis to a CMOS Heat-Capacity Measurement Structure [PDF] Markus Emmenegger, Jan G. Korvink, Martin Bächtold, Martin von Arx, Oliver Paul and Henry Baltes ![]() Cite this article Markus Emmenegger, Jan G. Korvink, Martin Bächtold, Martin von Arx, Oliver Paul and Henry Baltes, Application of Harmonic Finite Element Analysis to a CMOS Heat-Capacity Measurement Structure, Sens. Mater., Vol. 10, No. 7, 1998, p. 405-412. |