pp. 359-368
S&M379 Research Paper of Special Issue Published: 1999 Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process [PDF] Lungjieh Yang, Kuangyeu Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang and Peizen Chang Cite this article Lungjieh Yang, Kuangyeu Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang and Peizen Chang, Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process, Sens. Mater., Vol. 11, No. 6, 1999, p. 359-368. |