pp. 359-368
S&M379 Research Paper of Special Issue Published: 1999 Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process [PDF] Lungjieh Yang, Kuangyeu Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang and Peizen Chang ![]() Cite this article Lungjieh Yang, Kuangyeu Hsieh, Jinghung Chiou, Jennyi Chen, Chienliu Chang and Peizen Chang, Fabrication of 3-D Microcoils with Ferromagnetic Cores Using a Standard CMOS Process, Sens. Mater., Vol. 11, No. 6, 1999, p. 359-368. |