pp. 437-445
S&M1082 Research Paper of Special Issue https://doi.org/10.18494/SAM.2015.1132 Published: July 7, 2015 Bioinspired Piezoresistive Acceleration Sensor Using Artificial Filiform Sensillum Structure [PDF] Hyoungho Ko, Haryong Song, Seunghyun Im, Hyunho Kim, Byungmoon Jang, Hyungbo Shim and Dong-il “Dan” Cho (Received December 16, 2014; Accepted April 23, 2015) Keywords: biomimetic acceleration sensor, hairlike structure, filiform sensilum
Hairlike structures can be found in many living things, and are considered to be the fundamental sensing structure, especially for insects. In this paper, we present a bioinspired hairlike acceleration sensor using an artificial filiform sensillum structure. The hairlike acceleration sensor is fabricated using a rigid metal rod attached to a thin piezoresistive membrane. When external acceleration is applied to the rod, the torque generates the rotational angle, thus resulting in the deflection of the membrane. The noise equivalent input acceleration resolution, the input acceleration range, and the sensitivity of the fabricated sensor are 86 mg, ±5 g, and 0.576 mV/g, respectively.
Corresponding author: Dong-il “Dan” ChoCite this article Hyoungho Ko, Haryong Song, Seunghyun Im, Hyunho Kim, Byungmoon Jang, Hyungbo Shim and Dong-il “Dan” Cho, Bioinspired Piezoresistive Acceleration Sensor Using Artificial Filiform Sensillum Structure, Sens. Mater., Vol. 27, No. 6, 2015, p. 437-445. |