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Notice of retraction
Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Sensors and Materials, Volume 29, Number 11 (2017)
Copyright(C) MYU K.K.
pp. 1523-1529
S&M1446 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2017.1661
Published: November 24, 2017

80–100 V Low-Side Lateral Double-Diffused Metal Oxide Semiconductor Device with Sided Isolation of 0.35 um CMOS-Compatible Process [PDF]

Shao-Ming Yang, Gene Sheu, and Chirag Aryadeep

(Received April 20, 2017; Accepted August 15, 2017)

Keywords: linear p-top, charge balance, multiple RESURF, specific on-resistance, side isolation

In this study, a novel 80–100 V multiple reduced surface field (RESURF) lateral doublediffused metal oxide semiconductor (LDMOS) transistor with shallow trench isolation (STI) on both sides of the structure is developed and simulated using a Sentaurus process simulator. The proposed multiple RESURF LDMOS structure achieves benchmark specific on-state resistance while maintaining breakdown voltages of 80 and 100 V with better safe-operating area (SOA) performance. The key feature of this novel n-channel LDMOS (NLDMOS) device is the presence of linear p-top rings in the n-drift region. The optimization of the linear p-top mask design and concentration of p-top in the region is performed in order to achieve benchmark on-state resistance with the desired breakdown voltage. Linear p-top helps the diffusion current to move faster in the drift region, which helps to reduce on-state resistance.

Corresponding author: Shao-Ming Yang


Cite this article
Shao-Ming Yang, Gene Sheu, and Chirag Aryadeep, 80–100 V Low-Side Lateral Double-Diffused Metal Oxide Semiconductor Device with Sided Isolation of 0.35 um CMOS-Compatible Process, Sens. Mater., Vol. 29, No. 11, 2017, p. 1523-1529.



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