pp. 1523-1529
S&M1446 Research Paper of Special Issue https://doi.org/10.18494/SAM.2017.1661 Published: November 24, 2017 80–100 V Low-Side Lateral Double-Diffused Metal Oxide Semiconductor Device with Sided Isolation of 0.35 um CMOS-Compatible Process [PDF] Shao-Ming Yang, Gene Sheu, and Chirag Aryadeep (Received April 20, 2017; Accepted August 15, 2017) Keywords: linear p-top, charge balance, multiple RESURF, specific on-resistance, side isolation
In this study, a novel 80–100 V multiple reduced surface field (RESURF) lateral doublediffused metal oxide semiconductor (LDMOS) transistor with shallow trench isolation (STI) on both sides of the structure is developed and simulated using a Sentaurus process simulator. The proposed multiple RESURF LDMOS structure achieves benchmark specific on-state resistance while maintaining breakdown voltages of 80 and 100 V with better safe-operating area (SOA) performance. The key feature of this novel n-channel LDMOS (NLDMOS) device is the presence of linear p-top rings in the n-drift region. The optimization of the linear p-top mask design and concentration of p-top in the region is performed in order to achieve benchmark on-state resistance with the desired breakdown voltage. Linear p-top helps the diffusion current to move faster in the drift region, which helps to reduce on-state resistance.
Corresponding author: Shao-Ming YangCite this article Shao-Ming Yang, Gene Sheu, and Chirag Aryadeep, 80–100 V Low-Side Lateral Double-Diffused Metal Oxide Semiconductor Device with Sided Isolation of 0.35 um CMOS-Compatible Process, Sens. Mater., Vol. 29, No. 11, 2017, p. 1523-1529. |