pp. 1221-1230
S&M1579 30th Commemorative Article https://doi.org/10.18494/SAM.2018.1802 Published: June 14, 2018 Development of Infrared Focal Plane Arrays [PDF] Masafumi Kimata (Received November 9, 2017; Accepted February 28, 2018) Keywords: infrared imaging, quantum infrared detector, thermal infrared detector, charge transfer device, MEMS
Almost 40 years have passed since I started in infrared focal plane array (IRFPA) research and development at Mitsubishi Electric Corporation in 1980. Although our path was not in the mainstream, we developed original IRFPA technologies and fabricated products with our IRFPAs for both cooled and uncooled devices. In this paper, I introduce our accomplishments, including PtSi Schottky-barrier (SB) IRFPAs and silicon-on-insulator (SOI) diode uncooled IRFPAs.
Corresponding author: Masafumi KimataCite this article Masafumi Kimata, Development of Infrared Focal Plane Arrays, Sens. Mater., Vol. 30, No. 6, 2018, p. 1221-1230. |