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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 30, Number 6(1) (2018)
Copyright(C) MYU K.K.
pp. 1221-1230
S&M1579 30th Commemorative Article
https://doi.org/10.18494/SAM.2018.1802
Published: June 14, 2018

Development of Infrared Focal Plane Arrays [PDF]

Masafumi Kimata

(Received November 9, 2017; Accepted February 28, 2018)

Keywords: infrared imaging, quantum infrared detector, thermal infrared detector, charge transfer device, MEMS

Almost 40 years have passed since I started in infrared focal plane array (IRFPA) research and development at Mitsubishi Electric Corporation in 1980. Although our path was not in the mainstream, we developed original IRFPA technologies and fabricated products with our IRFPAs for both cooled and uncooled devices. In this paper, I introduce our accomplishments, including PtSi Schottky-barrier (SB) IRFPAs and silicon-on-insulator (SOI) diode uncooled IRFPAs.

Corresponding author: Masafumi Kimata


Cite this article
Masafumi Kimata, Development of Infrared Focal Plane Arrays, Sens. Mater., Vol. 30, No. 6, 2018, p. 1221-1230.



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