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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 31, Number 2(2) (2019)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 429-435
S&M1783 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2111 Published: February 18, 2019 High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices [PDF] Hsi-Shan Huang and Sean Wu (Received July 13, 2018; Accepted October 24, 2018) Keywords: SH SAW, (100) AlN, diamond, sensors
Shear horizontal (SH) surface acoustic wave (SAW) sensors formed by combining (100) AlN films with a diamond substrate have been developed in this research. The propagation characteristics of SAW in four composite structures according to the positions of interdigital transducer (IDT) electrodes and/or thin metal films were investigated theoretically. Those composite SAW substrates exhibited excellent SH SAW properties and have the potential for further application in biological and liquid SAW sensors.
Corresponding author: Sean Wu  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Hsi-Shan Huang and Sean Wu, High-shear-velocity Composite Acoustic Materials of AlN/Diamond for Biological MEMS Devices, Sens. Mater., Vol. 31, No. 2, 2019, p. 429-435. |
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