pp. 309-315
S&M2104 Research Paper of Special Issue https://doi.org/10.18494/SAM.2020.2597 Published: January 31, 2020 Analysis of Off‐state Leakage Currents in Poly-Si FinTFTs with Wide Drain by Microwave Annealing [PDF] Hsin-Hui Hu, Chun-Lin Huang, Yao-Jen Lee, and Kun-Ming Chen (Received February 21, 2019; Accepted December 2, 2019) Keywords: fin-like thin-film transistors, wide drain, longitudinal band-to-band tunneling (L-BTBT), low-temperature microwave annealing (MWA)
In this study, polycrystalline silicon fin-like thin-film transistors (poly-Si FinTFTs) with a wide drain structure are fabricated. The off leakage current of poly-Si FinTFTs with various extended wide drain lengths (LEX) is investigated. As LEX increases, the longitudinal electric field at the intrinsic drift/N+ drain junction decreases and improves the off leakage current derived from longitudinal band-to-band tunneling (L-BTBT). The off leakage current of poly-Si FinTFTs at different temperatures is also analyzed to investigate the leakage mechanisms. For poly-Si FinTFTs with a small LEX (= 0 and 0.8 mm), the weak dependence of leakage current on temperature indicates that the band-to-band tunneling (BTBT) is dominant. For poly-Si FinTFTs with a large LEX of 1.6 mm, the strong dependence of leakage current on temperature and the weak dependence of leakage current on drain voltage indicate that trap-assisted tunneling (TAT) is the dominant leakage mechanism. These results indicate that it is gate-induced drain leakage (GIDL), resulting from L-BTBT, that is effectively suppressed by increasing LEX.
Corresponding author: Hsin-Hui HuThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Hsin-Hui Hu, Chun-Lin Huang, Yao-Jen Lee, and Kun-Ming Chen, Analysis of Off‐state Leakage Currents in Poly-Si FinTFTs with Wide Drain by Microwave Annealing, Sens. Mater., Vol. 32, No. 1, 2020, p. 309-315. |