Young Researcher Paper Award 2021

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

Instructions to authors
English    日本語

Instructions for manuscript preparation
English    日本語


 Sensors and Materials
 1-23-3-303 Sendagi,
 Bunkyo-ku, Tokyo 113-0022, Japan
 Tel: 81-3-3827-8549
 Fax: 81-3-3827-8547

MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.

MYU Research

(proofreading and recording)

(translation service)

The Art of Writing Scientific Papers

(How to write scientific papers)
(Japanese Only)

Sensors and Materials, Volume 32, Number 5(2) (2020)
Copyright(C) MYU K.K.
pp. 1785-1795
S&M2217 Research Paper
Published: May 20, 2020

High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor [PDF]

Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li

(Received December 21, 2019; Accepted March 18, 2020)

Keywords: PMUT, fill factor, quality factor, acoustic efficiency, aluminum nitride

In this paper, we present a novel piezoelectric micromachined ultrasonic transducer (PMUT) array with a high fill factor and a large quality factor (Q). With the reusable design of etching holes, the pitch between PMUTs is effectively minimized, improving the fill factor of the array. With a newly developed surface micromachining process, the fabricated PMUT array only needs few etching holes to release the structure, and all sealed etching holes are removed from the resonance region, achieving a large Q. The demonstrated process facilitates low-cost volume manufacturing. As a result, a 50 × 50 PMUT array containing 48-μm-diameter PMUTs with a 52 μm pitch achieves a high fill factor of 67%. For an individual PMUT, a large Q of 351 is achieved at a center frequency of 12.62 MHz, the peak displacement is 3.25 nm/V, and the effective electromechanical coupling coefficient is 1.6%. The achieved high fill factor and large Q render the proposed PMUT array promising in applications such as flow sensing, chemical detection, and energy transmission.

Corresponding author: Xinxin Li

Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.

Cite this article
Ding Jiao, Zao Ni, Jiachou Wang, and Xinxin Li, High Fill Factor Array of Piezoelectric Micromachined Ultrasonic Transducers with Large Quality Factor, Sens. Mater., Vol. 32, No. 5, 2020, p. 1785-1795.

Forthcoming Regular Issues

Forthcoming Special Issues

Special Issue on Biosensors and Biofuel Cells for Smart Community and Smart Life
Guest editor, Seiya Tsujimura (University of Tsukuba), Isao Shitanda (Tokyo University of Science), and Hiroaki Sakamoto (University of Fukui)

Special Issue on the International Multi-Conference on Engineering and Technology Innovation 2021 (IMETI2021)
Guest editor, Wen-Hsiang Hsieh (National Formosa University)
Conference website

Special Issue on Novel Sensors and Related Technologies on IoT Applications: Part 1-2
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
Call for paper

Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2021)
Guest editor, Sheng-Joue Young (National United University), Shoou-Jinn Chang (National Cheng Kung University), Liang-Wen Ji (National Formosa University), and Yu-Jen Hsiao (Southern Taiwan University of Science and Technology)
Conference website
Call for paper

Special Issue on Advanced Technologies for Remote Sensing and Geospatial Analysis: Part 3
Guest editor, Dong Ha Lee (Kangwon National University) and Myeong Hun Jeong (Chosun University)
Call for paper

Special Issue on APCOT 2022
Guest editor, Yuelin Wang, Tie Li (Shanghai Institute of Microsystem and Information Technology) and Qingan Huang (Southeast University)
Conference website
Call for paper

Copyright(C) MYU K.K. All Rights Reserved.