pp. 1797-1810
S&M2218 Research Paper https://doi.org/10.18494/SAM.2020.2766 Published: May 20, 2020 A Drive Control Method for Silicon Micro-gyroscopes [PDF] Fu Zhu, Junying Chen, Hua Guo, Mou Liu, and Shipeng Han (Received January 6, 2020; Accepted March 19, 2020) Keywords: silicon micro-gyroscope, second-order frequency-locked loop, third-order PLL, drive control
The tracking ability of a silicon micro-gyroscope in a highly dynamic environment is a key
factor for MEMS and inertial technology. To improve the tracking ability in a highly dynamic
environment, a new drive control method for silicon micro-gyroscopes is proposed. First, a
double closed-loop system with a phase-locked loop (PLL) and an automatic gain control (AGC)
is designed to track the resonant frequency and stabilize the output amplitude. Second, the
framework and corresponding algorithm of a second-order frequency-locked loop (FLL)-assisted
third-order PLL were designed. Thereafter, the tracking performance characteristics of a thirdorder
PLL and the proposed second-order-FLL-assisted third-order PLL at different frequency
differences were simulated in Matlab Simulink. Simulation results show that the second-order-
FLL-assisted third-order PLL can track the resonant frequency in a shorter time with a higher
precision than the third-order PLL, and that the proposed method can still lock the resonant
frequency of 11570 Hz when the frequency difference increases to 400 Hz, demonstrating
its applicability in highly dynamic environments. Finally, the digital application specific integrated circuit (ASIC) test platform further validates the effectiveness of our proposed drive control method.
Corresponding author: Junying ChenThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Fu Zhu, Junying Chen, Hua Guo, Mou Liu, and Shipeng Han, A Drive Control Method for Silicon Micro-gyroscopes, Sens. Mater., Vol. 32, No. 5, 2020, p. 1797-1810. |