Micro hot plate chips were fabricated using MEMS process technology as a lab-on-chip platform for catalytic reactions. Ethylene was introduced, and its reactions occurred exclusively within the temperature-controlled heating area where the catalyst was deposited, while the remaining parts of the reactor were maintained at room temperature. One micro heater design was simulated to assess heating efficiency and was subsequently fabricated. The heating zone temperature was controlled by adjusting the supplied voltage. Two catalysts, silver and reduced vanadium oxide, were coated onto MEMS chips using an ultrasonic printing machine to explore their catalytic properties in ethylene reactions. The occurrence of the reactions was investigated. Focused ion beam and scanning electron microscopy techniques were employed to characterize the morphology of the catalyst deposited on the MEMS suspension film, whereas gas chromatography was used to quantify the concentration of chemical reaction products. A Matlab program was developed to evaluate the reaction rate and gas concentration, and to compare the experimental results obtained from both batch and flow reactors.