pp. 2199-2221
S&M4051 Research Paper https://doi.org/10.18494/SAM5617 Published: June 10, 2025 Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer [PDF] Nguyen Van Cuong, Nguyen Van Duong, Bui Van Cuong, and Chu Manh Hoang (Received March 10, 2025; Accepted May 14, 2025) Keywords: Two-axis MEMS accelerometer, air damping, fabrication error, cross-axis sensitivity
Micro-electromechanical system (MEMS)-based sensors play a vital role in the future of smart sensing applications owing to their small size, low power consumption, and cost-effectiveness. The issue of cross-axis sensitivity is of utmost importance when designing two-dimensional acceleration sensors. In this paper, we present the design of a two-dimensional acceleration sensor and investigate how the vibrations in different directions affect its sensitivity. A theoretical model, in which the effects of fabrication errors and air damping are considered, is built to investigate the sensor’s operation characteristics and optimize the sizes of the sensor’s spring systems in order to reduce cross-axis sensitivity. The results show that the cross-axis sensitivities in two-dimensional acceleration sensors have very small values, namely, 0.014% in the X-direction and 0.00649% in the Y-direction. The findings of this study are useful for the computation and development of two-dimensional acceleration sensors for high-precision measurements.
Corresponding author: Chu Manh Hoang![]() ![]() This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Nguyen Van Cuong, Nguyen Van Duong, Bui Van Cuong, and Chu Manh Hoang , Theoretical Model for Analyzing Cross-axis Sensitivity in 2D MEMS Accelerometer , Sens. Mater., Vol. 37, No. 6, 2025, p. 2199-2221. |