pp. 4447-4458
S&M4193 Research Paper https://doi.org/10.18494/SAM5844 Published: October 21, 2025 Geometric-overlap Modeling and Sweep Uniformity Optimization of Fixed Diamond Conditioning Disks for Chemical Mechanical Planarization [PDF] Yu-Chen Wang, Hong-Hui Lian, Yue-Feng Lin, and Ming-Yi Tsai (Received July 14, 2025; Accepted October 9, 2025) Keywords: CMP, diamond conditioning disk, polishing pad dressing uniformity, geometric-overlap model
In this study, we develop a graphics processing unit (GPU)-accelerated geometric-overlap model for fixed-abrasive diamond conditioning disks used in chemical mechanical planarization (CMP). The framework systematically evaluates how diamond-layout strategies and arm-sweep kinematics affect polishing pad coverage uniformity and overall economic performance. A planar rigid-body motion model is first established for diamond chips under the coupled action of disk self-rotation and arm oscillation, and a unified metric, the normalized overlap area ratio (NAR), is defined to quantify radial-sweep uniformity. Simulation conditions are assumed to be a pad diameter of 510 mm, an arm amplitude of ±34°, and a disk speed of 87 rpm; diamond counts from three to twelve are assessed. Trajectory superposition and hit-density statistics are accelerated on a GPU using CuPy. Results show that a single diamond traces an Archimedean-like spiral, mitigating local wear gradients and impact concentration. With seven to eight diamonds, phase-complementary effects fill the central sweep dead zone, raising NAR to ≈30% and optimizing radial and angular uniformities. Integrated cost-performance analysis indicates that a seven- or eight-diamond configuration provides the best trade-off between coverage efficiency and diamond usage; counts above eight lead to excessive overlap in the central region and uneven inner–outer distributions, shortening pad life and raising manufacturing costs, thus driving the system into diminishing returns. The proposed model supplies quantitative guidelines for CMP dresser design, delivering practical benefits for process stability and cost efficiency. These are critical for manufacturing high-performance sensors and devices on advanced material substrates.
Corresponding author: Ming-Yi Tsai![]() ![]() This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Yu-Chen Wang, Hong-Hui Lian, Yue-Feng Lin, and Ming-Yi Tsai, Geometric-overlap Modeling and Sweep Uniformity Optimization of Fixed Diamond Conditioning Disks for Chemical Mechanical Planarization, Sens. Mater., Vol. 37, No. 10, 2025, p. 4447-4458. |