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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 23, Number 3 (2011)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 159-166
S&M835 Research Paper https://doi.org/10.18494/SAM.2011.682 Published: May 13, 2011 Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor [PDF] Aimin Wu, Xing Wei, Zhifeng Yang, Jing Chen, Ming Chen, Dawei Bi, Zhengxuan Zhang and Xi Wang (Received February 9, 2010; Accepted July 13, 2010) Keywords: silicon on insulator (SOI), SOI-on-cavity, finite element analysis, pressure sensor
A new design of a micropressure sensor using stress concentration structure, which is fabricated on a silicon-on-insulator (SOI)-on-cavity substrate, is presented in this paper. High sensitivity and good linearity can be achieved simultaneously, and it is fabricated with a larger process tolerance than that by a traditional process. Moreover, it has potential applications in high-temperature environments. Mechanical analysis results and design rules of the structure based on finite element analysis are also presented.
Corresponding author: Aimin Wu Cite this article Aimin Wu, Xing Wei, Zhifeng Yang, Jing Chen, Ming Chen, Dawei Bi, Zhengxuan Zhang and Xi Wang, Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor, Sens. Mater., Vol. 23, No. 3, 2011, p. 159-166. |
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