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Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.

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Sensors and Materials, Volume 23, Number 3 (2011)
Copyright(C) MYU K.K.
pp. 159-166
S&M835 Research Paper
https://doi.org/10.18494/SAM.2011.682
Published: May 13, 2011

Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor [PDF]

Aimin Wu, Xing Wei, Zhifeng Yang, Jing Chen, Ming Chen, Dawei Bi, Zhengxuan Zhang and Xi Wang

(Received February 9, 2010; Accepted July 13, 2010)

Keywords: silicon on insulator (SOI), SOI-on-cavity, finite element analysis, pressure sensor

A new design of a micropressure sensor using stress concentration structure, which is fabricated on a silicon-on-insulator (SOI)-on-cavity substrate, is presented in this paper. High sensitivity and good linearity can be achieved simultaneously, and it is fabricated with a larger process tolerance than that by a traditional process. Moreover, it has potential applications in high-temperature environments. Mechanical analysis results and design rules of the structure based on finite element analysis are also presented.

Corresponding author: Aimin Wu


Cite this article
Aimin Wu, Xing Wei, Zhifeng Yang, Jing Chen, Ming Chen, Dawei Bi, Zhengxuan Zhang and Xi Wang, Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor, Sens. Mater., Vol. 23, No. 3, 2011, p. 159-166.



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