pp. 285-298
S&M59 Research Paper Published: 1990 Young's Modulus and Residual Stress of LPCVD Silicon-Rich Silicon Nitride Determined from Membrane Deflection [PDF] Richard A. Stewart, Jongnam Kim, Eun Sok Kim, Richard M. White and Richard S. Muller Cite this article Richard A. Stewart, Jongnam Kim, Eun Sok Kim, Richard M. White and Richard S. Muller, Young's Modulus and Residual Stress of LPCVD Silicon-Rich Silicon Nitride Determined from Membrane Deflection, Sens. Mater., Vol. 2, No. 5, 1990, p. 285-298. |