pp. 285-298
S&M59 Research Paper Published: 1990 Young's Modulus and Residual Stress of LPCVD Silicon-Rich Silicon Nitride Determined from Membrane Deflection [PDF] Richard A. Stewart, Jongnam Kim, Eun Sok Kim, Richard M. White and Richard S. Muller ![]() Cite this article Richard A. Stewart, Jongnam Kim, Eun Sok Kim, Richard M. White and Richard S. Muller, Young's Modulus and Residual Stress of LPCVD Silicon-Rich Silicon Nitride Determined from Membrane Deflection, Sens. Mater., Vol. 2, No. 5, 1990, p. 285-298. |