pp. 201-212
S&M324 Research Paper of Special Issue Published: 1998 Anisotropic Etching of Silicon in Saturated TMAHW Solutions for IC-Compatible Micromachining [PDF] P. M. Sarro, S. Brida, C. M. A. Ashruf, W. v. d. Vlist and H. v. Zeijl Cite this article P. M. Sarro, S. Brida, C. M. A. Ashruf, W. v. d. Vlist and H. v. Zeijl, Anisotropic Etching of Silicon in Saturated TMAHW Solutions for IC-Compatible Micromachining, Sens. Mater., Vol. 10, No. 4, 1998, p. 201-212. |