pp. 201-212
S&M324 Research Paper of Special Issue Published: 1998 Anisotropic Etching of Silicon in Saturated TMAHW Solutions for IC-Compatible Micromachining [PDF] P. M. Sarro, S. Brida, C. M. A. Ashruf, W. v. d. Vlist and H. v. Zeijl ![]() Cite this article P. M. Sarro, S. Brida, C. M. A. Ashruf, W. v. d. Vlist and H. v. Zeijl, Anisotropic Etching of Silicon in Saturated TMAHW Solutions for IC-Compatible Micromachining, Sens. Mater., Vol. 10, No. 4, 1998, p. 201-212. |