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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
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MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 10, Number 4 (1998)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 219-228
S&M326 Research Paper of Special Issue Published: 1998 Chemically Amplified Deep UV Resists for Micromachining Using Electron Beam Lithography and Dry Etching [PDF] Peter Hudek, Ivaylo W. Rangelow, Ivan Kostic, Günther Stangl, Piotr B. Grabiec, Emil W. Rangelow, Miro Belov and Feng Shi  Cite this article Peter Hudek, Ivaylo W. Rangelow, Ivan Kostic, Günther Stangl, Piotr B. Grabiec, Emil W. Rangelow, Miro Belov and Feng Shi, Chemically Amplified Deep UV Resists for Micromachining Using Electron Beam Lithography and Dry Etching, Sens. Mater., Vol. 10, No. 4, 1998, p. 219-228. |
Forthcoming Regular Issues
Forthcoming Special Issues
Special Issue on Applications of Novel Sensors and Related Technologies for Internet of Things
Guest editor, Teen-Hang Meen (National Formosa University), Wenbing Zhao (Cleveland State University), and Cheng-Fu Yang (National University of Kaohsiung)
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Special Issue on Advanced Sensing Technologies for Green Energy
Guest editor, Yong Zhu (Griffith University)
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Special Issue on Room-temperature-operation Solid-state Radiation Detectors
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Special Issue on International Conference on Biosensors, Bioelectronics, Biomedical Devices, BioMEMS/NEMS and Applications 2023 (Bio4Apps 2023)
Guest editor, Dzung Viet Dao (Griffith University) and Cong Thanh Nguyen (Griffith University)
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Special Issue on Advanced Sensing Technologies and Their Applications in Human/Animal Activity Recognition and Behavior Understanding
Guest editor, Kaori Fujinami (Tokyo University of Agriculture and Technology)
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Special Issue on Piezoelectric Thin Films and Piezoelectric MEMS
Guest editor, Isaku Kanno (Kobe University)
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For more information of Special Issues (click here)
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Special Issue on Signal Collection, Processing, and System Integration in Automation Applications
- Accepted papers (click here)
- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
Hirotaka Takizawa, Masatoshi Minamisawa, Hirohiko Motoki, Koichiro Kuwahara, and Masaki Yamaguchi
- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
Guest editor, Hsiung-Cheng Lin (National Chin-Yi University of Technology)
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Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2024)
Guest editor, Sheng-Joue Young (National United University)
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Special Issue on Asia-Pacific Conference of Transducers and Micro-Nano Technology 2024 (APCOT 2024)
Guest editor, Guangya ZHOU (National University of Singapore) and Chengkuo LEE (National University of Singapore)
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Special Issue on Sensing and Information and Communication Technologies toward Non-intrusive, Undisturbed, and Calm Healthcare Monitoring
Guest editor, Kosuke Motoi (Shizuoka Institute of Science and Technology)
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Special Issue on Redefining Perception: Applications of Artificial-intelligence-driven Sensor Systems
Guest editor, Pitikhate Sooraksa (King Mongkut’s Institute of Technology Ladkrabang)
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Special Issue on Materials, Devices, Circuits, and Analytical Methods for Various Sensors (Selected Papers from ICSEVEN 2024)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Mu-Chun Wang (Minghsin University of Science and Technology), Shih-Hung Lin (Chung Shan Medical University), Ja-Hao Chen (Feng Chia University)
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Special Issue on Spatial Information and Digital Twins for Built Environment Development
Guest editor, Jae Kang Lee (Dong-A University), Dong Ha Lee (Kangwon National University), Myeong Hun Jeong (Chosun University), Ji- Soo Park (Indiana State University), and Sung-Jin Kim (Hanbat National University)
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Special Issue on Sensing and Data Analysis Technologies for Living Environment, Health Care, Production Management, and Engineering/Science Education Applications (2024)
Guest editor, Chien-Jung Huang (National University of Kaohsiung), Rey-Chue Hwang (I-Shou University), Ja-Hao Chen (Feng Chia University), Ba-Son Nguyen (Lac Hong University)
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Special Issue on 2D Materials-based Sensors and MEMS/NEMS
Guest editor, Kazuhiro Takahashi (Toyohashi University of Technology)
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Special Issue on Geomatics Technologies for the Realization of Smart Cities
Guest editor, Prof. He Huang (Beijing University of Civil Engineering and Architecture) and Prof. Junxing Yang (Beijing University of Civil Engineering and Architecture)
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Special Issue on Smart Sensing Approaches for Low Carbon, Energy-efficient Manufacturing Processes
Guest editor, Cheng-Chi Wang (National Sun Yat-sen University)
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Special Issue on Smart Sensors for Chemical and Agriculture Applications
Guest editor, Kazuaki Sawada (Toyohashi University of Technology)
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Special Issue on Advanced Sensor Materials, Processes, and Applications
Guest editor, Shih-Chen Shi (National Cheng Kung University) and Tao-Hsing Chen (National Kaohsiung University of Science and Technology)
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Special Issue on Advances in Sensors and Computational Intelligence for Industrial Applications
Guest editor, Chih-Hsien Hsia (National Ilan University)
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- Accepted papers (click here)
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