pp. 337-350
S&M336 Research Paper of Special Issue Published: 1998 Monolithic Three-Dimensional Single-Crystal Silicon Microelectromechanical Systems [PDF] Wolfgang Hofmann, Chris S. Lee and Noel C. MacDonald Cite this article Wolfgang Hofmann, Chris S. Lee and Noel C. MacDonald, Monolithic Three-Dimensional Single-Crystal Silicon Microelectromechanical Systems, Sens. Mater., Vol. 10, No. 6, 1998, p. 337-350. |