Vol. 10 No. 6
Special Issue on Commemorating Professor Wolfgang Menz' 60th Birthday
Guest Editor: Jan G. Korvink (Microsystem Simulation) and Oliver Paul (Microsystem Materials)
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S&M334 Is technology Transfer Possible? Henry Baltes |
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S&M335 Micromechatronics Technology for Wearable Information and Communication Equipment Kiyoshi Itao |
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S&M336 Monolithic Three-Dimensional Single-Crystal Silicon Microelectromechanical Systems Wolfgang Hofmann, Chris S. Lee and Noel C. MacDonald |
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S&M337 Silicon Micromechanics for the Fiber-Optic Information Highway Cornel Marxer and Nico F. de Rooij |
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S&M338 LIGA - A Technology for Fabricating Microstructures and Microsystems Jürgen Mohr |
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S&M339 Processing of PZT Microstructures Shinan Wang, Jing-Feng Li, Xinghua Li and Masayoshi Esashi |
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S&M340 Micromachined Interfaces to the Cellular World Kensall D. Wise |
Cover of this Issue |
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