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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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English 日本語
Instructions for manuscript preparation
English 日本語
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English
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MYU K.K.
Sensors and Materials
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The Art of Writing Scientific Papers
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 15, Number 4 (2003)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 191-196
S&M520 Research Paper Published: 2003 Passivation Layer for Anodic Bonding of Silicon to Glass [PDF] Stefan Beißner, Philipp Sichler and Stephanus Büttgenbach (Received February 10, 2003; Accepted July 2, 2003) Keywords: anodic bonding, passivation layer, reactive sputtering, aluminum oxide, breakdown field strength
In order to avoid bonding or sticking of flexible silicon elements during anodic bonding of silicon to glass, we propose to apply a passivation layer of aluminum oxide to the glass surface. The investigated passivation layer was deposited using reactive sputtering of aluminum. Its breakdown field strength was measured and its effectiveness was proved in anodic bonding experiments.
 Cite this article Stefan Beißner, Philipp Sichler and Stephanus Büttgenbach, Passivation Layer for Anodic Bonding of Silicon to Glass, Sens. Mater., Vol. 15, No. 4, 2003, p. 191-196. |
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Special Issue on Advanced Micro/Nanomaterials for Various Sensor Applications (Selected Papers from ICASI 2024)
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- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
Hirotaka Takizawa, Masatoshi Minamisawa, Hirohiko Motoki, Koichiro Kuwahara, and Masaki Yamaguchi
- Deep Learning Prediction Model of Mortality Including Brain-type Natriuretic Peptide in Patients with Acute Decompensated Heart Failure
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