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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 15, Number 7 (2003)
Copyright(C) MYU K.K.
pp. 361-370
S&M534 Research Paper
Published: 2003

Highly Sensitive PMOSFET Photodetector and Its Application to CMOS Active Pixel Sensor [PDF]

Jae-Hyoun Park, Sang-Ho Seo, In-Soo Wang, Hyung-June Yoon, Jang-Kyoo Shin, Pyung Choi, Young-Chang Jo, and Hoon Kim

(Received July 23, 2003; Accepted September 26, 2003)

Keywords: PMOSFET, photodetector, CMOS, active pixel sensor

In this paper, a highly sensitive p-channel metal oxide field effect transistor (PMOSFET) photodetector fabricated using a standard complementary metal oxide semiconductor (CMOS) process is described. The photodetector is configured by the floating gate/n-well tied PMOSFET. The device has similar IDS-VDS characteristics to a general PMOSFET when the incident light power instead of the gate voltage is supplied and has a transient response fast enough that there is no image lag in its application to an imager with television resolution. A 1  16 CMOS active pixel sensor using the PMOSFET photode- tector was also designed and fabricated using 1-poly and 2-metal 1.5 m CMOS technol- ogy. The unit pixel of this sensor consists of a PMOSFET photodetector and four n- channel metal oxide field effect transistors (NMOSFET). Its area is 86 m  90.5 m and fill factor is 12%. Even though the pixel has a relatively small its fill factor, a sufficient photocurrent can be obtained. A highly sensitive pixel is feasible with the use of the photodetector with current amplification and the pixel circuit with voltage gain.

Corresponding author: Jang-Kyoo Shin


Cite this article
Jae-Hyoun Park, Sang-Ho Seo, In-Soo Wang, Hyung-June Yoon, Jang-Kyoo Shin, Pyung Choi, Young-Chang Jo, and Hoon Kim, Highly Sensitive PMOSFET Photodetector and Its Application to CMOS Active Pixel Sensor, Sens. Mater., Vol. 15, No. 7, 2003, p. 361-370.



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