In this article, we focus on the development of a laminated patterning technique for various types of self-assembled monolayer (SAM) by microcontact printing (CP). Using this technique, three types of functional SAM with hydrophobic and hydrophilic surface properties are patterned selectively on a silicon wafer. After the line shape of hexadecanethiol (CH3(CH2)15SH(CH3), HDT) is patterned on a Au substrate by CP, the cross line pattern of 11-mercaptoundecanoic acid (HS(CH2)10COOH, 11-MUA) is transferred to the lami- nated Au substrate. Finally, the external area of the transferred SAM pattern on the sample is coated with dodecyltrichlorosilane (C12H25Cl3Si, DTS). The surface property of each SAM is measured by lateral force microscopy (LFM). This laminated patterning technique enables the fabrication of bio-micro-electro-mechanical system (bio-MEMS) devices by CP.