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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials, Volume 17, Number 5 (2005)
Copyright(C) MYU K.K.
pp. 237-247
S&M602 Research Paper of Special Issue
Published: 2005

MEMS Based High Dose Radiation Resistant SOI Pressure Sensor for Aerospace Applications [PDF]

Kyung Il Lee, M.M.Nayak, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida and K. Rajanna

(Received August 21, 2004; Accepted December 3, 2004)

Keywords: pressure sensors, SOI, radiation environment, microheaters

Transducers used in nuclear propulsion systems and space applications must withstand high–dose radiation environments along with high temperature operation. However, performance characteristics of various conventional silicon sensors are degraded at high temperature environments, and also show substantial radiation damage due to ionization in silicon. In this paper, a MEMS based high-dose radiation resistant SOI pressure sensor with integrated microheaters to maintain constant temperature for artificial satellites is developed, and its suitability for operation under high -dose radiation environment is reported. The developed sensor has inbuilt microheater arrangement for constant temperature operation. SOI pressure sensors were subjected to a radiation dosage level up to 100 krad, and performance characteristics such as linearity, offset and sensitivity were evaluated.

Corresponding author: Kyung Il Lee


Cite this article
Kyung Il Lee, M.M.Nayak, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida and K. Rajanna, MEMS Based High Dose Radiation Resistant SOI Pressure Sensor for Aerospace Applications, Sens. Mater., Vol. 17, No. 5, 2005, p. 237-247.



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