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Sensors and Materials, Volume 18, Number 4 (2006)
Copyright(C) MYU K.K.
pp. 173-181
S&M641 Research Paper
Published: 2006

Langasite Membranes for Surface Acoustic Wave Pressure Sensors [PDF]

Tao Han, Xiaojun Ji and Wenkang Shi

(Received February 2, 2005; Accepted August 26, 2005)

Keywords: surface acoustic wave, pressure sensor, langasite

On the basis of the electroelastic perturbation model, which includes electrical perturbation items, a doubly rotated cut area of langasite (LGS) defined by the Euler angles φ, from 137° to 160°, and ψ, from 18° to 25°, is proposed as a design for pressure sensors because it has good temperature stability (TCD < 10 ppm), high electromechanical coupling coefficients (k2 > 0.4%) and relatively high pressure sensitivity (6–8 × 10–12/(Pa · (R/h)2). Differential surface acoustic wave resonators made of LGS (0°, 150° and 22°) have been fabricated and tested. The measured fractional frequency changes among the differential resonators vs pressure from 0 to 0.6 MPa verify that the experimental relative sensitivity is 3.7 × 10–10 fractional frequency change per Pa, which is in agreement with the calculated prediction. The temperature dependence is within 2.5 kHz/℃ in the range from 20℃ to 100℃.

Corresponding author: Tao Han

Cite this article
Tao Han, Xiaojun Ji and Wenkang Shi, Langasite Membranes for Surface Acoustic Wave Pressure Sensors, Sens. Mater., Vol. 18, No. 4, 2006, p. 173-181.

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