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Sensors and Materials
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Sensors and Materials, Volume 18, Number 4 (2006)
Copyright(C) MYU K.K.
pp. 183-197
S&M642 Research Paper
Published: 2006

Developing Miniature Nanostructured Semiconductor-Metal-Oxide Gas Sensors [PDF]

Jian-Wei Gong and Quan-Fang Chen

(Received April 21, 2005; Accepted November 8, 2005)

Keywords: MEMS sensor, nanostructured SMO, ambient temperature, relative humidity, feed-back control

Micromachined nanostructured semiconductor-metal-oxide (SMO) gas sensors have proven promising in gas detection due to their improved sensitivity, robustness, simple signal processing, low fabrication cost and low energy consumption. However, the development of nanostructured micro-SMO sensors must not only satisfy performancerelated requirements, but also face reliability-related challenges, particularly false alarm problems caused by environmentally induced drift and shift. In this article, we present results obtained in the development of a novel nanostructured micromachined SMO gas sensor and discuss the challenges in finding solutions to minimize the influences of environmental factors such as temperature, relative humidity, light and oxygen partial pressure.

Corresponding author: Quan-Fang Chen

Cite this article
Jian-Wei Gong and Quan-Fang Chen, Developing Miniature Nanostructured Semiconductor-Metal-Oxide Gas Sensors, Sens. Mater., Vol. 18, No. 4, 2006, p. 183-197.

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