pp. 19-30
S&M966 Research Paper https://doi.org/10.18494/SAM.2014.10675 Published: January 30, 2014 Zirconia Ceramics Applied in a Pressure-Sensitive Device Fabricated Using HTCC Technology [PDF] Qiu Lin Tan, Li Qin, Hao Kang, Ji Jun Xiong, Wen Dong Zhang, Tao Luo, Chen Li, Li Qiong Ding, Xian Sheng Zhang and Ming Liang Yang (Received June 16, 2013; Accepted September 9, 2013) Keywords: zirconia ceramic, high-temperature cofired ceramics (HTCC), capacitive pressure sensor, wireless passive sensor, LC circuit, mutual inductance coupling
A wireless passive high-temperature cofired ceramic (HTCC) pressure sensor fabricated from partially stabilized zirconia (PSZ) ceramic is proposed. This sensor can be used in high-temperature environments (in excess of 1000 ℃ in some cases) owing to its high mechanical strength at high thermal stress, and pressure data can be transmitted through mutual inductance coupling. Experimental systems are designed to obtain the necessary frequency-pressure and frequency-temperature characteristics. The experimental results between room temperature and 800 ℃ (and then at 800 ℃ for 30 min) indicate that the sensor has improved stability at 800 ℃ and the sensor also shows a high sensitivity at room temperature.
Corresponding author: Li Qin, Hao Kang, Ji Jun XiongCite this article Qiu Lin Tan, Li Qin, Hao Kang, Ji Jun Xiong, Wen Dong Zhang, Tao Luo, Chen Li, Li Qiong Ding, Xian Sheng Zhang and Ming Liang Yang, Zirconia Ceramics Applied in a Pressure-Sensitive Device Fabricated Using HTCC Technology, Sens. Mater., Vol. 26, No. 1, 2014, p. 19-30. |