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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 28, Number 9 (2016)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 975-981
S&M1259 Research Paper of Special Issue https://doi.org/10.18494/SAM.2016.1386 Published: September 21, 2016 Effect of Sputtering Power on Optical and Electrical Properties of Indium Tin Oxide Films [PDF] Shiuh-Chuan Her and Chun-Fu Chang (Received December 21, 2015; Accepted May 25, 2016) Keywords: indium tin oxide, transmittance, sputtering power, resistivity
Indium tin oxide (ITO) films were deposited onto a glass substrate by direct current (DC) magnetron sputtering. The effect of the sputtering power on the microstructure, electrical, andoptical electrical properties was examined. Experimental results indicated that increasing thesputtering power caused surface roughness to decrease while the resistivity increased. The averageof the optical transmittance in the wavelength region of 300–1200 nm for ITO films decreased from 77 to 73% as the sputtering power increased from 50 to 200 W. Results of this work suggested thata better performance of both optical transparency and electrical conductivity of ITO films can beachieved by operating at a low level of sputtering power.
Corresponding author: Shiuh-Chuan Her Cite this article Shiuh-Chuan Her and Chun-Fu Chang, Effect of Sputtering Power on Optical and Electrical Properties of Indium Tin Oxide Films, Sens. Mater., Vol. 28, No. 9, 2016, p. 975-981. |
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