pp. 1053-1066
S&M1267 Research Paper of Special Issue https://doi.org/10.18494/SAM.2016.1394 Published: September 21, 2016 A 3D Optical Sensor Using Optical Axis Deviation Method for Rotational Errors [PDF] Hau-Wei Lee, Te-Ping Chiu, and Chien-Hung Liu (Received December 31, 2015; Accepted May 23, 2016) Keywords: ball lens, quadrant photodiode detector, rotational accuracy, axial error, radial error
This paper presents a 3D optical sensor system for measuring errors in the motion of a rotatingstage or spindle based on optical axis deviation using a precision ball lens. The radial and axialerrors can be simultaneously measured during rotation. The 3D sensor consists of two quadrantphotodiode detectors (QDs), two laser diodes, and a ball lens mounted on the rotating stageor spindle. Rotational errors cause changes in the optical axis of the ball lens. The resultingdeflections of the laser beams are detected by the QDs and their output signals are used to determineerrors. The radial and axial rotational errors can be calculated as described by the mathematicalmodel. Experimental results showed that the measuring accuracy was within ±1 µm at a resolutionof about 20 nm.
Corresponding author: Chien-Hung LiuCite this article Hau-Wei Lee, Te-Ping Chiu, and Chien-Hung Liu, A 3D Optical Sensor Using Optical Axis Deviation Method for Rotational Errors, Sens. Mater., Vol. 28, No. 9, 2016, p. 1053-1066. |