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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 28, Number 8 (2016)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 927-931
S&M1253 Perspective https://doi.org/10.18494/SAM.2016.1428 Published: August 24, 2016 Sensors in Network (2) —Fabrication Technologies— [PDF] Kazusuke Maenaka (Received July 11, 2016; Accepted July 20, 2016) Keywords: bulk micromachining, surface micromachining, SoC, SiP, WLCSP
In the previous session, the concept and current status of highly functional sensors wereoutlined. The technologies for realizing such sensors are discussed in this session. For detailsof individual technologies such as thin-film deposition, patterning, and etching, please refer topublished textbooks. In this session, I review the basic principle of frequently used technologiesand their history.
Corresponding author: Kazusuke Maenaka Cite this article Kazusuke Maenaka, Sensors in Network (2) —Fabrication Technologies—, Sens. Mater., Vol. 28, No. 8, 2016, p. 927-931. |
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