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Vol. 34, No. 8(3), S&M3042

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Vol. 32, No. 8(2), S&M2292

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Sensors and Materials
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Sensors and Materials, Volume 29, Number 6(2) (2017)
Copyright(C) MYU K.K.
pp. 817-826
S&M1370 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2017.1476
Published: June 21, 2017

Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation [PDF]

Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, and Hidetoshi Saitoh

(Received September 23, 2016; Accepted December 26, 2016)

Keywords: diamond-like carbon, hydrogen desorption, soft X-ray, film modification, NEXAFS

We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.

Corresponding author: Kazuhiro Kanda


Cite this article
Kazuhiro Kanda, Ryo Imai, Masahito Niibe, Hisashi Yoshioka, Keishi Komatsu, and Hidetoshi Saitoh, Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation, Sens. Mater., Vol. 29, No. 6, 2017, p. 817-826.



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