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Vol. 34, No. 8(3), S&M3042

Notice of retraction
Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Sensors and Materials
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Sensors and Materials, Volume 29, Number 4 (2017)
Copyright(C) MYU K.K.
pp. 397-404
S&M1332 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2017.1521
Published: April 19, 2017

Electrical Properties of Nanocrystalline Strontium Barium Niobate Thin Films Deposited at Room Temperature [PDF]

Hsueh-Feng Hung, Cheng-Fu Yang, and Chia-Ching Wu

(Received August 30, 2016; Accepted January 6, 2017)

Keywords: strontium barium niobate, nanometer grain size, ferroelectric properties, thin film

Strontium barium niobate (Sr0.3Ba0.7Nb2O6, SBN) thin films of good quality were deposited on silicon substrates by radio frequency magnetron sputtering at room temperature and under different deposition pressures. The surface morphology and thicknesses of the SBN thin films were characterized by field emission scanning electron microscopy, and it was found that the thickness increased as the deposition pressure increased. The nanocrystalline structure of the SBN thin films was observed for 10 and 30 mTorr deposition pressures. Ferroelectric properties were determined by measuring leakage current density, capacitance, and polarization. For the SBN thin film deposited at 30 mTorr, the remnant polarization, saturation polarization, and coercive field values were 20.67 μC/cm2, 12.23 μC/cm2, and 1.73 MV/cm, respectively.

Corresponding author: Chia-Ching Wu


Cite this article
Hsueh-Feng Hung, Cheng-Fu Yang, and Chia-Ching Wu, Electrical Properties of Nanocrystalline Strontium Barium Niobate Thin Films Deposited at Room Temperature, Sens. Mater., Vol. 29, No. 4, 2017, p. 397-404.



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