pp. 405-410
S&M1333 Research Paper of Special Issue https://doi.org/10.18494/SAM.2017.1522 Published: April 19, 2017 Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation [PDF] Wei-Che Shih, Ying-Chung Chen, Chien-Chuan Cheng, Kuo-Sheng Kao, Da-Long Cheng, Po-Wei Ting, and Huan-Hsien Yeh (Received August 30, 2016; Accepted December 22, 2016) Keywords: frequency tuning, acoustic wave device, simulation, Mason model
Acoustic wave devices are divided into two categories: surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices. To provide modification parameters during manufacturing, advanced modeling, simulation, and other computational methods is crucial for maintaining a competitive edge through efficient product design. In this study, an equivalent circuit modification based on the Mason model is used for obtaining the actual device measurements. The effects of various film conditions, material properties, and geometrical variations on resonator performance are investigated. Furthermore, the performance of a filter comprising various stages of series and parallel resonators is examined.
Corresponding author: Kuo-Sheng KaoCite this article Wei-Che Shih, Ying-Chung Chen, Chien-Chuan Cheng, Kuo-Sheng Kao, Da-Long Cheng, Po-Wei Ting, and Huan-Hsien Yeh, Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation, Sens. Mater., Vol. 29, No. 4, 2017, p. 405-410. |