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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
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Sensors and Materials, Volume 30, Number 5(2) (2018)
Copyright(C) MYU K.K.
pp. 1175-1185
S&M1574 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.1733
Published: May 31, 2018

Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors [PDF]

Chindanai Ratanaporncharoen, Miyuki Tabata, Natthapol Watanagool, Tatsuro Goda, Akira Matsumoto, Mana Sriyudthsak, and Yuji Miyahara

(Received August 31, 2017; Accepted March 28, 2018)

Keywords: Iridium oxide, pH microsensor

In this study, we evaluate the thermal oxidization methods of iridium to simplify the fabrication of Ir/IrOx pH microsensors. Iridium oxide (IrOx) is a typical pH-sensing material. Specifically, three parameters of the previously reported “carbonate-melt” method are modified, namely, the oxidization temperature, oxidization time, and annealing process after oxidization. Then, we compare the characteristics of the fabricated sensors (i.e., the initial pH responsivity, time required to reach the steady state, and potential drift). The pH response depends on the oxidization temperature and time.

Corresponding author: Yuji Miyahara


Cite this article
Chindanai Ratanaporncharoen, Miyuki Tabata, Natthapol Watanagool, Tatsuro Goda, Akira Matsumoto, Mana Sriyudthsak, and Yuji Miyahara, Characterization and Optimization of Thermally Grown Iridium Oxide and Its Application to pH Sensors, Sens. Mater., Vol. 30, No. 5, 2018, p. 1175-1185.



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