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Vol. 34, No. 8(3), S&M3042

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Sensors and Materials
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Sensors and Materials, Volume 30, Number 11(1) (2018)
Copyright(C) MYU K.K.
pp. 2401-2418
S&M1685 Research Paper of Special Issue
https://doi.org/10.18494/SAM.2018.1976
Published: November 7, 2018

Vibration Measurement and Suppression for Laser Galvanometers Using a Micro-electromechanical System-based Accelerometer [PDF]

Po-Huan Chou, Yu-Liang Hsu, Shih-Chin Yang, Hsing-Cheng Chang, Yu-Chen Kuo, Li-Feng Chiu, and Yu-Tai Chen

(Received January 18, 2018; Accepted July 3, 2018)

Keywords: galvanometer, MEMS-based accelerometer, vibration analysis, analog comb filter, vibration suppression

In this study, we develop a vibration measurement, analysis, and suppression system for laser galvanometers. A galvanometer control system integrates a notebook computer, an intelligent motion control platform (IMP-2), a servo driver circuit, and a galvanometer driver module for driving laser galvanometers. The proposed vibration measurement, analysis, and suppression system composed of a micro-electromechanical system (MEMS) piezoelectric accelerometer, the fast Fourier transformation (FFT) algorithm operated on a notebook computer, and an analog comb filter circuit is utilized to measure, analyze, and suppress vibrations generated from the mirror-installed galvanometer motors during rotation motions, respectively. First, we use the MEMS-based accelerometer to measure and record the vibration signals from the mirror-installed galvanometer motors during rotation motions. Second, we carry out the frequency spectrum analysis of vibration acceleration signals using the FFT algorithm. Subsequently, we design an efficient analog comb filter on the basis of the observed harmonic or resonance frequencies for suppressing the galvanometer vibrations. Finally, on the basis of the experimental results, we successfully validate that the proposed inertial-sensing-based vibration measurement, analysis, and suppression system can measure and analyze the galvanometer vibrations, and suppress them effectively to improve the accuracy and stability of the laser galvanometer scanning systems.

Corresponding author: Yu-Liang Hsu


Cite this article
Po-Huan Chou, Yu-Liang Hsu, Shih-Chin Yang, Hsing-Cheng Chang, Yu-Chen Kuo, Li-Feng Chiu, and Yu-Tai Chen, Vibration Measurement and Suppression for Laser Galvanometers Using a Micro-electromechanical System-based Accelerometer, Sens. Mater., Vol. 30, No. 11, 2018, p. 2401-2418.



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