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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 30, Number 12(3) (2018)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 2999-3007
S&M1736 Research Paper of Special Issue https://doi.org/10.18494/SAM.2018.2033 Published: December 28, 2018 Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation [PDF] Yusuke Takei, Shintaro Goto, Seiichi Takamatsu, Toshihiro Itoh, and Takeshi Kobayashi (Received June 26, 2018; Accepted October 22, 2018) Keywords: pressure sensor, strain sensor, ultrathin silicon, piezoresistive silicon membrane, flexible device
In this study, we developed a highly sensitive and flexible contact pressure sensor by transferring an ultrathin piezoresistive silicon membrane to a flexible substrate. The sensor consists of two sensors, a contact pressure sensor and a strain sensor for strain compensation. From the output of these two sensors, strain caused by fixing the sensor to the curved surface can be compensated for, so that we can accurately measure contact pressure. In the experiments, we confirmed that the fabricated contact pressure sensor has the same sensitivity on both a flat surface and a curved surface. We also confirmed that our sensor can correctly measure contact pressure by compensating for the distortion when fixed to a curved surface.
Corresponding author: Yusuke Takei Cite this article Yusuke Takei, Shintaro Goto, Seiichi Takamatsu, Toshihiro Itoh, and Takeshi Kobayashi, Flexible Contact Pressure Sensor based on Ultrathin Piezoresistive Silicon Membrane Capable of Strain Compensation, Sens. Mater., Vol. 30, No. 12, 2018, p. 2999-3007. |
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