pp. 2627-2636
S&M1704 Research Paper of Special Issue https://doi.org/10.18494/SAM.2018.2081 Published: November 20, 2018 Analysis of Pull-in Characteristics of Double-clamped Nanobeam Incorporating Casimir and van der Waals Effects [PDF] Cheng-Chi Wang, Chih-Jer Lin, Chin-Chia Liu, and Chia-Chiang Hsu (Received March 28, 2018; Accepted September 7, 2018) Keywords: double-clamped nanobeam, NEMS, pull-in voltage, Casimir force, van der Waals (vdW) force
A hybrid numerical scheme comprising the differential transformation method (DTM) and the finite difference (FD) approximation approach is used to analyze the complex nonlinear pull-in behavior of an electrostatically actuated double-clamped nanobeam subject to Casimir and van der Waals force effects and an axial residual stress. It is shown that, for an initial gap size of 50 nm, the pull-in voltage predicted by the hybrid numerical scheme deviates from that predicted by the universal pull-in formula by just 0.2%. In addition, the results show that the Casimir and van der Waals forces both have a significant effect on the steady and dynamic deflection behaviors of the beam as a function of applied voltage. Finally, the minimum allowable gap without the applied voltage of double-clamped nanobeams can be determined.
Corresponding author: Chin-Chia LiuCite this article Cheng-Chi Wang, Chih-Jer Lin, Chin-Chia Liu, and Chia-Chiang Hsu, Analysis of Pull-in Characteristics of Double-clamped Nanobeam Incorporating Casimir and van der Waals Effects, Sens. Mater., Vol. 30, No. 11, 2018, p. 2627-2636. |