pp. 2873-2881
S&M1978 Research Paper of Special Issue https://doi.org/10.18494/SAM.2019.2322 Published: September 20, 2019 Optimization of Surface Treatment on MEMS Probes for Single-cell Capture and Release [PDF] Kensaku Hayashi, Momoko Kumemura, Shohei Kaneda, Vivek Menon, Laurent Jalabert, Saeko Tachikawa, Mehmet C. Tarhan, Teruo Fujii, Beomjoon Kim, and Hiroyuki Fujita (Received February 6, 2019; Accepted April 9, 2019) Keywords: MEMS tweezers, cell handling, single-cell trapping, surface modification, surface treatment
Micro-electromechanical systems (MEMS) tweezers developed for the trapping and characterization of bio molecules such as DNA are also capable of cell handling, which will enable further application involving single cell characterization. However, cellular adhesion to Si tweezers surfaces can inhibit the release of cells after capture and analysis. To allow for high-throughput cell handling, the surface modification process for probe sidewalls was optimized. The hydrophilicity of sample silicon wafers modified with various chemical coatings was measured to identify the optimal process. The surface modification was then applied to MEMS probes and the feasibility of cell capture/release was evaluated.
Corresponding author: Momoko KumemuraThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Kensaku Hayashi, Momoko Kumemura, Shohei Kaneda, Vivek Menon, Laurent Jalabert, Saeko Tachikawa, Mehmet C. Tarhan, Teruo Fujii, Beomjoon Kim, and Hiroyuki Fujita, Optimization of Surface Treatment on MEMS Probes for Single-cell Capture and Release, Sens. Mater., Vol. 31, No. 9, 2019, p. 2873-2881. |