pp. 3083-3094
S&M2324 Research Paper of Special Issue https://doi.org/10.18494/SAM.2020.2737 Published: September 30, 2020 Flexible-substrate Fluxgate Current Sensor Based on MEMS Technology [PDF] Yang Shanglin and Fan Rong (Received December 15, 2019; Accepted August 26, 2020) Keywords: current sensor, fluxgate, MEMS, flexible substrate, soft magnetic material core
A method of preparing a flexible-substrate fluxgate based on MEMS technology was proposed, and the prepared flexible-substrate fluxgate was applied as a current sensor for online measurement. On the basis of MEMS technology, we combined the high precision and high stability of the fluxgate with the flexible and extension characteristics of the substrate to prepare a fluxgate current sensor. This flexible-substrate fluxgate current sensor not only has high precision, but also has the advantage of convenient online measurement of a Rogowski coil.
Corresponding author: Yang ShanglinThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Yang Shanglin and Fan Rong, Flexible-substrate Fluxgate Current Sensor Based on MEMS Technology, Sens. Mater., Vol. 32, No. 9, 2020, p. 3083-3094. |