pp. 2569-2576
S&M2283 Research Paper of Special Issue (Prof. Yang) https://doi.org/10.18494/SAM.2020.2900 Published: August 10, 2020 Carbon Dioxide Sensing Characteristics of AlGaN/GaN High Electron Mobility Transistor with ZnO Nanorods [PDF] Kwang Hyeon Baik and Soohwan Jang (Received April 7, 2020; Accepted June 2, 2020) Keywords: carbon dioxide, gas sensor, AlGaN/GaN, HEMT, ZnO
A CO2 sensor based on an AlGaN/GaN high electron mobility transistor (HEMT) was developed using ZnO nanorods as the sensing material. The sensor showed a reliable response to a wide range of CO2 concentrations from 500 to 100000 ppm at 300 °C. The CO2 response of the device was tested from 25 to 400 °C, and the sensor started to exhibit responsivity to 30000 ppm CO2 gas at 150 °C. The responsivity increased with the ambient temperature until the temperature reached 300 °C, and it decreased from 350 to 400 °C. The maximum responsivity of the sensor with ZnO nanorods was 4.31% for 10% CO2 exposure at 300 °C. In addition, the effect of humidity on the CO2 sensing characteristics was investigated. AlGaN/GaN-heterostructure-based CO2 sensors functionalized with ZnO nanorods have high potential for applications in the chemical, medical, energy, and food industries.
Corresponding author: Soohwan JangThis work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Kwang Hyeon Baik and Soohwan Jang, Carbon Dioxide Sensing Characteristics of AlGaN/GaN High Electron Mobility Transistor with ZnO Nanorods, Sens. Mater., Vol. 32, No. 8, 2020, p. 2569-2576. |