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Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
Online: ISSN 2435-0869
Sensors and Materials
is an international peer-reviewed open access journal to provide a forum for researchers working in multidisciplinary fields of sensing technology.
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Sensors and Materials
is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
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MYU K.K.
Sensors and Materials
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is covered by Science Citation Index Expanded (Clarivate Analytics), Scopus (Elsevier), and other databases.
Instructions to authors
English 日本語
Instructions for manuscript preparation
English 日本語
Template
English
Publisher
MYU K.K.
Sensors and Materials
1-23-3-303 Sendagi,
Bunkyo-ku, Tokyo 113-0022, Japan
Tel: 81-3-3827-8549
Fax: 81-3-3827-8547
MYU Research, a scientific publisher, seeks a native English-speaking proofreader with a scientific background. B.Sc. or higher degree is desirable. In-office position; work hours negotiable. Call 03-3827-8549 for further information.
MYU Research
(proofreading and recording)
MYU K.K.
(translation service)
The Art of Writing Scientific Papers
(How to write scientific papers)
(Japanese Only)
Sensors and Materials, Volume 33, Number 3(3) (2021)
Copyright(C) MYU K.K.
Copyright(C) MYU K.K.
|
pp. 1073-1080
S&M2517 Research Paper of Special Issue https://doi.org/10.18494/SAM.2021.2915 Published: March 24, 2021 Relationship between Thermal Stability and Structure of MEMS Cantilevers Embedded in an Elastomer [PDF] Toshihiro Takeshita, Natsumi Makimoto, Takeshi Kobayashi, and Seiichi Takamatsu (Received April 30, 2020; Accepted July 22, 2020) Keywords: MEMS, force sensor, cantilever, thermal endurance, PDMS
The thermal stability of a micro-electromechanical system (MEMS) cantilever force sensor embedded in an elastomer was examined. When mounting the cantilever on an electronic substrate using solder reflow at 250 ℃, the elastomer expands against the back of the cantilever. The expansion often breaks the cantilever. The effects of the cantilever thickness and width on the breaking strength and the stress concentration points were simulated by finite element methods, and the results agreed well with experimental results. This work is expected to improve the thermal stability of MEMS cantilever force sensors by optimizing their design.
Corresponding author: Toshihiro Takeshita  This work is licensed under a Creative Commons Attribution 4.0 International License. Cite this article Toshihiro Takeshita, Natsumi Makimoto, Takeshi Kobayashi, and Seiichi Takamatsu, Relationship between Thermal Stability and Structure of MEMS Cantilevers Embedded in an Elastomer, Sens. Mater., Vol. 33, No. 3, 2021, p. 1073-1080. |
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