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Vol. 32, No. 8(2), S&M2292

Print: ISSN 0914-4935
Online: ISSN 2435-0869
Sensors and Materials
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Sensors and Materials, Volume 32, Number 12(1) (2020)
Copyright(C) MYU K.K.
pp. 4037-4045
S&M2392 Research Paper
https://doi.org/10.18494/SAM.2020.2963
Published: December 10, 2020

High-spatial-resolution X-ray Imaging by Scintillator in Silicon Collimator [PDF]

Kento Tabata, Ryota Ohtake, and Toru Aoki

(Received June 18, 2020; Accepted November 9, 2020)

Keywords: X-ray detector, high-spatial-resolution scintillator detector, thallium-doped cesium iodide, collimator, modulation transfer function, thallium concentration, optical separation, pixel structures

The purpose of this paper is to improve the spatial resolution of scintillator X-ray image detectors. The spatial resolution of these detectors is lower than that of other direct conversion detectors because of the diffusion of visible light in the scintillator. This problem was solved by using a collimator manufactured from a silicon wafer. The silicon wafer was processed to make many small square holes in a grid pattern by a MEMS technique for the optical separation of visible light in the scintillator upon X-ray irradiation. Moreover, the structures of these grid holes were integrated with a silicon photodiode array to operate as a single detector. The properties of thallium-doped cesium iodide (CsI:Tl) depend on the Tl concentration. By optimizing the filling conditions of the scintillator for the silicon, collimator, the emission characteristics of CsI:Tl were adjusted to ensure their suitability for use with the Si photodiode, and the sealed state was observed by SEM and computed tomography (CT). CsI:Tl was encapsulated in a collimator under optimized conditions, and the improved spatial resolution was confirmed from the Modulation Transfer Function (MTF). The pixel-structured scintillator with a silicon collimator was successfully fabricated, and our method shows the high-spatial-resolution imaging performance of an indirect X-ray imaging detector.

Corresponding author: Kento Tabata


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Cite this article
Kento Tabata, Ryota Ohtake, and Toru Aoki, High-spatial-resolution X-ray Imaging by Scintillator in Silicon Collimator, Sens. Mater., Vol. 32, No. 12, 2020, p. 4037-4045.



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